The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Sep. 16, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Thomas Kwon, Dublin, CA (US);
Xinhai Han, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H10B 41/35 (2023.02); H01L 29/40114 (2019.08); H01L 29/42324 (2013.01); H10B 41/27 (2023.02);
Abstract
Methods of forming 3D NAND devices are discussed. Some embodiments form 3D NAND devices with a control gate and a floating gate disposed between a first insulating layer and a second insulating layer. A conformal blocking liner surrounds the floating gate and electrically isolates the control gate from the floating gate. Some embodiments form 3D NAND devices with decreased vertical and/or later pitch between cells.