The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Jul. 11, 2019
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Jeronimo Segovia Fernandez, San Jose, CA (US);
Peter Smeys, San Jose, CA (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/145 (2006.01); H03H 9/02 (2006.01); H03H 9/25 (2006.01); H01L 41/053 (2006.01); G01L 3/10 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02952 (2013.01); G01L 3/10 (2013.01); H01L 41/0533 (2013.01); H03H 9/02637 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01);
Abstract
A torque sensor chip including a semiconductor substrate, an acoustic reflector formed on the semiconductor substrate, and first and second Lamb wave resonators (LWRs). The first LWR is formed on a side of the acoustic reflector opposite the semiconductor substrate. The first LWR is at a first angle with respect to an axis of the IC. The second LWR also is formed on the side of the acoustic reflector opposite the semiconductor substrate. The second LWR is at a second angle, different than the first angle, with respect to the axis of the IC.