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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11621226 B1

PDFFull Text
Date of Patent:
Apr. 04, 2023

Filed:

Feb. 09, 2021

Graphene diffusion barrier

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Yong Wu, Sunnyvale, CA (US);

Srinivas Gandikota, Santa Clara, CA (US);

Abhijit Basu Mallick, Palo Alto, CA (US);

Srinivas D. Nemani, Sunnyvale, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Servilla Whitney LLC

Primary Examiner:

Victor A Mandala

Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 21/3205 (2006.01); C23C 16/455 (2006.01); C23C 16/26 (2006.01); H10B 69/00 (2023.01); H01L 27/115 (2017.01);
U.S. Cl.
CPC ...
H01L 23/53266 (2013.01); C23C 16/26 (2013.01); C23C 16/45536 (2013.01); H01L 21/28568 (2013.01); H01L 21/32051 (2013.01); H01L 21/76841 (2013.01); H01L 27/115 (2013.01);
Abstract

A graphene barrier layer is disclosed. Some embodiments relate to a graphene barrier layer capable of preventing diffusion from a fill layer into a substrate surface and/or vice versa. Some embodiments relate to a graphene barrier layer that prevents diffusion of fluorine from a tungsten layer into the underlying substrate. Additional embodiments relate to electronic devices which contain a graphene barrier layer.

Find Patent Forward Citations

Wu, Yong. (2023). Graphene diffusion barrier (U.S. Patent No. 11621226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11621226

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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