The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Aug. 10, 2020
Applicant:
The Regents of the University of California, Oakland, CA (US);
Inventors:
Nobuhiko Kobayashi, Santa Cruz, CA (US);
Wenchang Yeh, Santa Cruz, CA (US);
Assignees:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 29/16 (2006.01); H01L 29/24 (2006.01); C30B 19/08 (2006.01); C30B 19/12 (2006.01); C30B 29/42 (2006.01); C30B 29/40 (2006.01); C30B 13/06 (2006.01); C30B 13/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02565 (2013.01); C30B 13/06 (2013.01); C30B 13/24 (2013.01); C30B 19/08 (2013.01); C30B 19/12 (2013.01); C30B 29/16 (2013.01); C30B 29/406 (2013.01); C30B 29/42 (2013.01); H01L 21/0243 (2013.01); H01L 21/02389 (2013.01); H01L 21/02395 (2013.01); H01L 21/02631 (2013.01); H01L 21/02683 (2013.01); H01L 29/242 (2013.01); H01L 21/02422 (2013.01);
Abstract
A multi-layer thin film composite is formed by applying a thin film formed from non-single-crystalline oxide onto a substrate; applying a protection film onto the thin film; and supplying energy to the thin film through at least one of the protection film or the substrate.