The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Feb. 26, 2016
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/305 (2006.01); H01J 37/08 (2006.01); H01J 37/26 (2006.01); H01J 37/304 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/08 (2013.01); H01J 37/265 (2013.01); H01J 37/30 (2013.01); H01J 37/304 (2013.01); H01J 37/3053 (2013.01); H01J 2237/026 (2013.01); H01J 2237/202 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20221 (2013.01);
Abstract
Provided is a machining technology to obtain a desired machining content while suppressing a possibility of causing a redeposition in a machining surface. The invention is directed to provide an ion milling device which includes an ion source which emits an ion beam, a sample holder which holds a sample, and a sample sliding mechanism which slides the sample holder in a direction including a normal direction of an axis of the ion beam.