The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Jan. 24, 2019
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventors:
Shuilang Dong, Beijing, CN;
Xin Gu, Beijing, CN;
Kang Guo, Beijing, CN;
Da Lu, Beijing, CN;
Qingzhao Liu, Beijing, CN;
Lei Zhao, Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/12 (2006.01); G02B 5/30 (2006.01); G03F 7/00 (2006.01); G03F 7/16 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
G02B 5/3058 (2013.01); C23F 1/12 (2013.01); G03F 7/0005 (2013.01); G03F 7/167 (2013.01); G03F 7/427 (2013.01);
Abstract
A method of manufacturing a metal wire, a method of manufacturing a metal wire grid, a wire grid polarizer, and an electronic device are provided. The method of manufacturing a metal wire includes: forming a metal material layer on a base substrate; etching the metal material layer by using a composite gas including an etching gas and a coating reaction gas to form the metal wire and a protective coating layer on a surface of the metal wire.