The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2023

Filed:

Mar. 23, 2021
Applicant:

Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;

Inventors:

Lutz Gottsmann, Grossroehrsdorf, DE;

Georg Laimer, Meissen, DE;

Jens Melcher, Dresden, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/54 (2006.01); H01L 21/677 (2006.01); C23C 14/56 (2006.01); C23C 14/50 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); C23C 14/30 (2013.01); C23C 14/50 (2013.01); C23C 14/566 (2013.01); C23C 16/54 (2013.01); H01L 21/677 (2013.01);
Abstract

Coating processes for vacuum chamber arrangements and apparatus thereof are herein disclosed. In some aspects, a coating process may include coating at least one workpiece using a vacuum chamber arrangement. The vacuum chamber arrangement may include a vacuum chamber, a substrate holding arrangement, an additional substrate holding arrangement, one or more bearings, a supply hose and an additional supply hose. The vacuum chamber may include a lock chamber, an additional lock chamber, a heating chamber, an additional heating chamber, and a coating chamber. The one or more bearings may support the substrate holding arrangement in such a way that it can be moved between the lock chamber and the coating chamber. The one or more bearings may also support the additional substrate holding arrangement in such a way that it can be moved between the additional lock chamber and the coating chamber.


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