The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Aug. 05, 2019
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Kyubum Kim, Yongin-si, KR;
Sungjin Kim, Yongin-si, KR;
Chunyoung Park, Yongin-si, KR;
Uno Chang, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 51/56 (2006.01); G03F 7/20 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); B05B 12/22 (2018.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); G03F 7/707 (2013.01); G03F 7/70733 (2013.01); H01L 21/67745 (2013.01); H01L 21/68764 (2013.01); H01L 21/68778 (2013.01); H01L 51/56 (2013.01); B05B 12/22 (2018.02); H01L 2221/67 (2013.01); H01L 2224/03002 (2013.01); H01L 2224/0345 (2013.01);
Abstract
A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.