The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2023

Filed:

Sep. 30, 2020
Applicant:

Lumentum Operations Llc, San Jose, CA (US);

Inventors:

Jun Yang, Cupertino, CA (US);

Guowei Zhao, Milpitas, CA (US);

Matthew Glenn Peters, Menlo Park, CA (US);

Eric R. Hegblom, Sunnyvale, CA (US);

Ajit Vijay Barve, San Jose, CA (US);

Benjamin Kesler, Sunnyvale, CA (US);

Assignee:

Lumentum Operations LLC, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/00 (2006.01); H01S 5/30 (2006.01); H01S 5/183 (2006.01); H01S 5/34 (2006.01); H01S 5/042 (2006.01);
U.S. Cl.
CPC ...
H01S 5/3095 (2013.01); H01S 5/18311 (2013.01); H01S 5/18358 (2013.01); H01S 5/18361 (2013.01); H01S 5/18366 (2013.01); H01S 5/0421 (2013.01); H01S 5/183 (2013.01); H01S 5/1838 (2013.01); H01S 5/18363 (2013.01); H01S 5/18369 (2013.01); H01S 5/18372 (2013.01); H01S 5/18375 (2013.01); H01S 5/18377 (2013.01); H01S 5/3416 (2013.01);
Abstract

A VCSEL may include an n-type substrate layer and an n-type bottom mirror on a surface of the n-type substrate layer. The VCSEL may include an active region on the n-type bottom mirror and a p-type layer on the active region. The VCSEL may include an oxidation layer over the active region to provide optical and electrical confinement of the VCSEL. The VCSEL may include a tunnel junction over the p-type layer to reverse a carrier type of an n-type top mirror. Either the oxidation layer is on or in the p-type layer and the tunnel junction is on the oxidation layer, or the tunnel junction is on the p-type layer and the oxidation layer is on the tunnel junction. The VCSEL may include the n-type top mirror over the tunnel junction, a top contact layer over the n-type top mirror, and a top metal on the top contact layer.


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