The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2023

Filed:

Mar. 23, 2022
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Tetsuya Yamashita, Yokkaichi, JP;

Takuyo Nakayama, Inagi, JP;

Takashi Ichikawa, Saitama, JP;

Tadayoshi Uechi, Kawasaki, JP;

Takashi Izumida, Kamakura, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11565 (2017.01); H01L 27/11575 (2017.01); H01L 27/11582 (2017.01); H01L 27/11578 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11565 (2013.01); H01L 27/11575 (2013.01); H01L 27/11578 (2013.01); H01L 27/11582 (2013.01);
Abstract

According to one embodiment, a semiconductor memory device includes a first stacked body in which a plurality of first conductive layers are stacked at intervals in a first direction above a semiconductor substrate; a second stacked body in which a plurality of second conductive layers are stacked at intervals in the first direction above the semiconductor substrate; and a first slit extending in a second direction perpendicular to the first direction, the first slit isolating the first stacked body and the second stacked body in a third direction perpendicular to the first and second directions.


Find Patent Forward Citations

Loading…