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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11616032 B1

PDFFull Text
Date of Patent:
Mar. 28, 2023

Filed:

Jan. 20, 2021

Semiconductor device having alignment pads and method of manufacturing the same

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Daniel Maurer, Feld am See, AT;

Christof Altstaetter, Gaimberg, AT;

Thomas Beyreder, Villach, AT;

Oliver Blank, Villach, AT;

Jürgen Bostjancic, Ludmannsdorf, AT;

Andreas Kleinbichler, Villach, AT;

Josef Liegl, Kappel am Krappfeld, AT;

Nicole Schulze-Ollmert, Villach, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:

Murphy, Bilak & Homiller, PLLC

Primary Examiner:

Mamadou L Diallo

Int. Cl.
CPC ...
H01L 23/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); G01R 31/2891 (2013.01); H01L 24/03 (2013.01); H01L 2224/0217 (2013.01); H01L 2224/03015 (2013.01); H01L 2224/05166 (2013.01); H01L 2224/05184 (2013.01); H01L 2224/05193 (2013.01);
Abstract

A semiconductor device includes a semiconductor substrate having a main surface over which a plurality of die pads and at least one alignment pad for optical process control for semiconductor wafer probing are arranged. The alignment pad has a hardness smaller than a hardness of the plurality of die pads.

Find Patent Forward Citations

Maurer, Daniel. (2023). Semiconductor device having alignment pads and method of manufacturing the same (U.S. Patent No. 11616032). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11616032

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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