The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Jun. 09, 2020
Semes Co., Ltd., Cheonan-si, KR;
Daesung Kim, Suwon-si, KR;
Eunwoo Park, Gyeongsan-si, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
The apparatus includes a plurality of process chambers having treatment spaces configured to process the substrate in the treatment spaces, and an exhaust unit to exhaust gas from the treatment space. The exhaust unit includes a plurality of individual exhaust pipes directly connected to the treatment spaces in one process chamber or the plurality of process chambers, a main exhaust pipe connected to the plurality of individual exhaust pipes, a pressure reducing member installed in the main exhaust pipe to reduce pressure of the treatment space, and a damper member mounted in each of the individual exhaust pipes to adjust an amount of gas exhausted through the individual exhaust pipe. The damper member includes a first damper to adjust an amount of gas exhausted from the treatment spaces, and a second damper disposed downstream of the first damper to buffer a pressure change caused by adjusting the first damper.