The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
May. 18, 2020
Massachusetts Institute of Technology, Cambridge, MA (US);
Cheng Peng, Beijing, CN;
Christopher Louis Panuski, Somerville, MA (US);
Ryan Hamerly, Cambridge, MA (US);
Dirk Robert Englund, Brookline, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
A reflective spatial light modulator (SLM) made of an electro-optic material in a one-sided Fabry-Perot resonator can provide phase and/or amplitude modulation with fine spatial resolution at speeds over a Gigahertz. The light is confined laterally within the electro-optic material/resonator layer stack with microlenses, index perturbations, or by patterning the layer stack into a two-dimensional (2D) array of vertically oriented micropillars. Alternatively, a photonic crystal guided mode resonator can vertically and laterally confine the resonant mode. In phase-only modulation mode, each SLM pixel can produce a π phase shift under a bias voltage below 10 V, while maintaining nearly constant reflection amplitude. This high-speed SLM can be used in a wide range of new applications, from fully tunable metasurfaces to optical computing accelerators, high-speed interconnects, true 2D phased array beam steering, beam forming, or quantum computing with cold atom arrays.