The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2023

Filed:

Jun. 23, 2020
Applicant:

Beijing Voyager Technology Co., Ltd., Beijing, CN;

Inventors:

Youmin Wang, Mountain View, CA (US);

Yue Lu, Mountain View, CA (US);

Zuow-Zun Chen, Mountain View, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 7/481 (2006.01); G02B 26/08 (2006.01); G01S 17/02 (2020.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01S 7/481 (2013.01); B81B 3/0018 (2013.01); G01S 17/02 (2013.01); G02B 26/0833 (2013.01); B81B 2201/047 (2013.01);
Abstract

Embodiments of the disclosure provide systems and methods for incorporating an optical sensing system in a MEMS package for real-time sensing of angular position of a MEMS mirror. The system may include an optical source configured to emit an optical signal to a backside of the MEMS mirror. The system may also include an optical detector configured to receive a returning optical signal reflected by the backside of the MEMS mirror. The system may further include at least one controller. The at least one controller may be configured to determine a scanning angle of the MEMS mirror based on a position on the optical detector where the returning optical signal is received.


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