The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Sep. 13, 2018
Applicant:
Lg Chem, Ltd., Seoul, KR;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/14 (2006.01); C08F 220/30 (2006.01); B29C 59/00 (2006.01); C08F 212/08 (2006.01); C08F 293/00 (2006.01); H01L 21/311 (2006.01); B29K 96/04 (2006.01);
U.S. Cl.
CPC ...
B29C 59/14 (2013.01); B29C 59/005 (2013.01); C08F 212/08 (2013.01); C08F 220/301 (2020.02); C08F 293/005 (2013.01); H01L 21/31138 (2013.01); B29K 2096/04 (2013.01); C08F 2438/03 (2013.01);
Abstract
A method for preparing a patterned substrate includes selectively etching any one segment block of a self-assembled block copolymer from a laminate having a substrate; wherein a block copolymer membrane is formed on the substrate and the substrate contains the self-assembled block copolymer. According to the method, the self-assembled pattern of the block copolymer can be efficiently and accurately transferred on the substrate to prepare a patterened substate.