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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11612956 B1

PDFFull Text
Date of Patent:
Mar. 28, 2023

Filed:

Mar. 03, 2017

Laser light radiation device and laser light radiation method

Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Yasunori Igasaki, Hamamatsu, JP;

Aiko Nakagawa, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:

Faegre Drinker Biddle & Reath LLP

Primary Examiner:

Andrew D Graham

Int. Cl.
CPC ...
B23K 26/064 (2014.01); B23K 26/035 (2014.01); B23K 26/00 (2014.01); G02F 1/13 (2006.01); B23K 26/53 (2014.01); B23K 26/70 (2014.01); B23K 26/03 (2006.01); B23K 26/08 (2014.01); H01L 21/268 (2006.01); H01L 21/67 (2006.01); H01L 21/78 (2006.01); H01L 41/338 (2013.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
B23K 26/064 (2015.10); B23K 26/00 (2013.01); B23K 26/0006 (2013.01); B23K 26/032 (2013.01); B23K 26/035 (2015.10); B23K 26/083 (2013.01); B23K 26/53 (2015.10); B23K 26/705 (2015.10); G02F 1/13 (2013.01); H01L 21/268 (2013.01); H01L 21/67092 (2013.01); H01L 21/67115 (2013.01); H01L 21/67259 (2013.01); H01L 21/78 (2013.01); H01L 41/338 (2013.01); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08);
Abstract

A laser light irradiation device includes: a laser light source; a spatial light modulator including a display unit configured to display a phase pattern; an objective lens configured to condense a laser light emitted from the spatial light modulator at the object; an image-transfer optical system configured to transfer an image of the laser light on the display unit to an entrance pupil plane of the objective lens; a reflected light detector configured to detect reflected light of the laser light which is incident in the object and reflected by an opposite surface opposite to a laser light entrance surface; and a controller configured to control the phase pattern. When the reflected light detector detects the reflected light, the controller displays a reflected light aberration correction pattern which is the phase pattern correcting aberration generated in the event of the laser light being transmitted through the object having twice the predetermined thickness.

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