The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Jun. 09, 2020
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Christian Bretthauer, Munich, DE;
Pradyumna Mishra, San Jose, CA (US);
Daniel Neumaier, Feldkirchen, AT;
David Tumpold, Kirchheim b München, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/09 (2006.01); H01L 41/047 (2006.01); H01L 41/113 (2006.01); G01P 15/18 (2013.01); G01H 11/08 (2006.01); G01P 1/02 (2006.01); H04R 17/02 (2006.01); B81B 7/04 (2006.01); H04R 1/28 (2006.01); H04R 1/04 (2006.01); H04R 7/18 (2006.01); H04R 17/10 (2006.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); B81B 7/04 (2013.01); G01H 11/08 (2013.01); G01P 15/0802 (2013.01); G01P 15/09 (2013.01); G01P 15/18 (2013.01); H01L 41/047 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01); H04R 1/28 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); G01P 1/023 (2013.01); G01P 2015/084 (2013.01); H04R 1/04 (2013.01); H04R 7/18 (2013.01); H04R 17/10 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MicroElectroMechanical Structure (MEMS) accelerometer includes a piezoelectric membrane including at least one electrode and an inertial mass, the piezoelectric membrane being affixed to a holder; and a circuit for evaluating sums and differences of signals associated with the at least one electrode to determine a three-dimensional acceleration direction, wherein the at least one electrode includes a segmented electrode, and wherein the segmented electrode includes four segmentation zones.