The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2023

Filed:

Aug. 17, 2018
Applicant:

University of Florida Research Foundation, Incorporated, Gainesville, FL (US);

Inventor:

Roozbeh Tabrizian, Gainesville, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H01L 27/20 (2006.01); H03H 3/02 (2006.01); H03H 9/10 (2006.01); H03H 9/13 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/177 (2013.01); H01L 27/20 (2013.01); H03H 3/02 (2013.01); H03H 9/1007 (2013.01); H03H 9/13 (2013.01); H03H 2003/027 (2013.01); H03H 2009/155 (2013.01);
Abstract

A Fin Bulk Acoustic Resonator (FinBAR) includes a fin integrally fabricated on a substrate of a glass or a semiconductor, an inner electrode deposited on the fin, a piezoelectric layer disposed on the inner electrode, an outer electrode deposited on the piezoelectric layer, a first electrode and a second electrode formed on the top surface of the substrate and connected to the inner and outer electrodes respectfully. The fin is characterized with a larger height than its width. A FinBAR array including a number of the FinBARs with different fin widths sequentially located on one chip is capable of continuously filtering frequencies in UHF and SHF bands.


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