The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2023

Filed:

Apr. 15, 2021
Applicant:

Nichia Corporation, Anan, JP;

Inventor:

Seiichi Hayashi, Anan, JP;

Assignee:

NICHIA CORPORATION, Anan, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/32 (2010.01); H01L 33/02 (2010.01); H01L 33/08 (2010.01);
U.S. Cl.
CPC ...
H01L 33/0075 (2013.01); H01L 33/025 (2013.01); H01L 33/08 (2013.01); H01L 33/32 (2013.01); H01L 33/325 (2013.01);
Abstract

A method includes forming a first n-type nitride semiconductor layer; forming a first light-emitting layer on the first n-type nitride semiconductor layer; forming a first nitride semiconductor layer on the first light-emitting layer by introducing a gas comprising gallium and having a first flow rate; forming a first p-type nitride semiconductor layer on the first nitride semiconductor layer; forming an n-type intermediate layer on the first p-type nitride semiconductor layer; forming a second n-type nitride semiconductor layer on the n-type intermediate layer; forming a second light-emitting layer on the second n-type nitride semiconductor layer; forming a second nitride semiconductor layer on the second light-emitting layer by introducing a gas comprising gallium and having a second flow rate; and forming a second p-type nitride semiconductor layer on the second nitride semiconductor layer. The first flow rate is less than the second flow rate.


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