The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Sep. 18, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Bhaskar Prasad, Jamshedpur, IN;
Kirankumar Neelasandra Savandaiah, Bangalore, IN;
Srinivasa Rao Yedla, Bangalore, IN;
Nitin Bharadwaj Satyavolu, Kakinada, IN;
Hari Prasath Rajendran, Coimbatore, IN;
Lakshmikanth Krishnamurthy Shirahatti, Bangalore, IN;
Thomas Brezoczky, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one example, an electrostatic chuck comprises a chuck body having a top surface configured to support a substrate and a bottom surface opposite the top surface. The chuck body comprises one or more chucking electrodes, and one or more heating elements. The chuck body further comprises first terminals disposed on the bottom surface of the chuck body and coupled with the one or more heating elements, second terminals disposed on the bottom surface of the chuck body and coupled with the one or more chucking electrodes, and third terminals disposed on the bottom first surface of the chuck body and coupled with the one or more chucking electrodes.