The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2023

Filed:

Mar. 13, 2019
Applicant:

Plansee Composite Materials Gmbh, Lechbruck am See, DE;

Inventors:

Peter Polcik, Reutte, AT;

Szilard Kolozsvari, Landsberg am Lech, DE;

Igor Zhirkov, Linkoeping, SE;

Johanna Rosen, Linkoeping, SE;

Assignee:

Plansee Composite Materials GmbH, Lechbruck am See, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32055 (2013.01); C23C 14/067 (2013.01); C23C 14/325 (2013.01); H01J 37/3255 (2013.01); H01J 37/32541 (2013.01); H01J 2237/332 (2013.01);
Abstract

A vacuum arc source for arc evaporation of boride includes: a cathode made of at least 90 at-% of boride, in particular made of more than 98 at-% of boride; an anode, which is preferably in the shape of a disk; a body made of a material which is less preferred by arc discharge compared to the cathode, the body surrounding the cathode in such a way that during operation of the vacuum arc source, movement of an arc on an arc surface of the cathode is limited by the body. At least 90 at-% of the material of the anode is of the same chemical composition as the cathode.


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