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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11610755 B1

PDFFull Text
Date of Patent:
Mar. 21, 2023

Filed:

Oct. 21, 2021

Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Robert Trauner, Pliening, DE;

Bernhard Schüler, Munich, DE;

Bernhard G. Mueller, Finsing, DE;

Nikolai Knaub, Munich, DE;

Kulpreet Singh Virdi, Munich, DE;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Nicole M Ippolito

Assistant Examiner:

Hanway Chang

Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06T 7/00 (2017.01); H01J 37/21 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06T 7/0004 (2013.01); H01J 37/21 (2013.01); H01L 21/67288 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30168 (2013.01); H01J 2237/216 (2013.01);
Abstract

A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

Find Patent Forward Citations

Trauner, Robert. (2023). Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample (U.S. Patent No. 11610755). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11610755

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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