The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2023

Filed:

Jul. 23, 2020
Applicant:

Vg Systems Limited, Chesire, GB;

Inventors:

Oliver Greenwood, East Grinstead, GB;

Adam Bushell, East Grinstead, GB;

Michael Hugh Humpherson, Redhill, GB;

Assignee:

VG Systems Limited, East Grinstead, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/227 (2018.01); G01N 23/2273 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2273 (2013.01); G01N 2223/07 (2013.01); G01N 2223/40 (2013.01); G01N 2223/507 (2013.01);
Abstract

An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.


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