The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Apr. 05, 2019
Applicant:
Samsung Sdi Co., Ltd., Yongin-si, KR;
Inventors:
Ki Wook Hwang, Suwon-si, KR;
Sang Ran Koh, Suwon-si, KR;
Youn Jin Cho, Suwon-si, KR;
Jung Min Choi, Suwon-si, KR;
Kwen Woo Han, Suwon-si, KR;
Jun Young Jang, Suwon-si, KR;
Yong Woon Yoon, Suwon-si, KR;
Assignee:
SAMSUNG SDI CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); H01L 21/31111 (2013.01);
Abstract
An etching composition for silicon nitride comprising: a phosphoric acid compound; water; and at least one of a silane compound represented by Formula 1, below, and a reaction product thereof, and an etching method using the same are disclosed,