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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11604263 B1

PDFFull Text
Date of Patent:
Mar. 14, 2023

Filed:

Mar. 25, 2020

Polygon mirror and mems interconnect with multiple turns

Applicant:

Innoviz Technologies Ltd, Rosh Ha'Ayin, IL;

Inventors:

Ronen Eshel, Givatayim, IL;

Michael Girgel, Kiryat Motzkin, IL;

Assignee:

INNOVIZ TECHNOLOGIES LTD, Rosh Ha'Ayin, IL;

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner LLP

Primary Examiner:

James R Hulka

Int. Cl.
CPC ...
G01S 7/00 (2006.01); G01S 7/481 (2006.01); G01S 17/931 (2020.01); G01H 1/00 (2006.01); G01S 17/10 (2020.01); G01S 7/4863 (2020.01); G01S 7/4914 (2020.01); G01S 17/32 (2020.01); G01S 17/58 (2006.01); G01S 7/48 (2006.01); G01S 7/484 (2006.01); G01S 7/4911 (2020.01); G01S 17/42 (2006.01); B81B 3/00 (2006.01); B60S 1/02 (2006.01); G01S 7/497 (2006.01); G01S 17/06 (2006.01); G01S 17/89 (2020.01); G02B 26/12 (2006.01);
U.S. Cl.
CPC ...
G01S 7/4817 (2013.01); B60S 1/02 (2013.01); B81B 3/0018 (2013.01); G01H 1/00 (2013.01); G01S 7/4802 (2013.01); G01S 7/484 (2013.01); G01S 7/4808 (2013.01); G01S 7/4814 (2013.01); G01S 7/4815 (2013.01); G01S 7/4816 (2013.01); G01S 7/4863 (2013.01); G01S 7/497 (2013.01); G01S 7/4911 (2013.01); G01S 7/4914 (2013.01); G01S 17/06 (2013.01); G01S 17/10 (2013.01); G01S 17/32 (2013.01); G01S 17/42 (2013.01); G01S 17/58 (2013.01); G01S 17/89 (2013.01); G01S 17/931 (2020.01); B81B 2201/04 (2013.01); G01S 2007/4975 (2013.01); G02B 26/122 (2013.01);
Abstract

A MEMS scanning device may include: a movable MEMS mirror configured to pivot about at least one axis; at least one actuator operable to rotate the MEMS mirror about the at least one axis, each actuator out of the at least one actuator operable to bend upon actuation to move the MEMS mirror; and at least one flexible interconnect element coupled between the at least one actuator and the MEMS mirror for transferring a pulling force of the bending of the at least one actuator to the MEMS mirror. Each flexible interconnect element out of the at least one interconnect element may be an elongated structure comprising at least two turns at opposing directions, each turn greater than 120°.

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