The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2023
Filed:
May. 26, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Thomas Knisley, Livonia, MI (US);
Mark Saly, Santa Clara, CA (US);
David Alexander Britz, Los Gatos, CA (US);
David Thompson, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); F01D 5/28 (2006.01); C23C 16/455 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/30 (2006.01); C23C 16/56 (2006.01); F01D 9/02 (2006.01); F01D 25/12 (2006.01); F01D 25/28 (2006.01); F23R 3/28 (2006.01); C07F 11/00 (2006.01); F01D 25/14 (2006.01);
U.S. Cl.
CPC ...
F01D 5/288 (2013.01); C23C 16/30 (2013.01); C23C 16/34 (2013.01); C23C 16/405 (2013.01); C23C 16/45529 (2013.01); C23C 16/45553 (2013.01); C23C 16/45555 (2013.01); C23C 16/56 (2013.01); F01D 5/286 (2013.01); F01D 9/02 (2013.01); F01D 25/12 (2013.01); F01D 25/28 (2013.01); F23R 3/28 (2013.01); C07F 11/005 (2013.01); F01D 25/145 (2013.01); F05D 2230/314 (2013.01);
Abstract
Methods for depositing protective coatings on aerospace components are provided and include sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface of the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.