The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Dec. 21, 2018
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Marie Gorisse, Voiron, FR;
Alexandre Reinhardt, Saint-Martin d'Heres, FR;
Lamine Benaissa, Massy, FR;
Jean-Sébastien Moulet, Chambery, FR;
Abstract
A method for producing an adjustable bulk acoustic wave resonator comprising a transducer stack (E) and a tuning stack (E). According to the invention, transducer stack (E) includes two defined electrodes () and piezoelectric material (), and stack (E) includes a layer of piezoelectric material () and two defined electrodes (). The method includes: a) production of the transducer stack; b) formation of an electrically insulating layer on an electrode () of the transducer stack; c) formation of a defined electrode () of the tuning stack on the electrically insulting layer such that it is aligned with the electrodes of the transducer stack; d) assembly, on the electrode (), of a substrate of piezoelectric material; e) fracturing of the substrate of piezoelectric material; and f) formation of the other defined electrode () of the tuning stack, aligned with the defined electrode ().