The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Dec. 29, 2020
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Domenico Giusti, Caponago, IT;
Carlo Luigi Prelini, Seveso, IT;
Marco Ferrera, Concorezzo, IT;
Carla Maria Lazzari, Casatenovo, IT;
Luca Seghizzi, Milan, IT;
Nicolo′ Boni, Albino, IT;
Roberto Carminati, Piancogno, IT;
Fabio Quaglia, Pizzale, IT;
STMICROELECTRONICS S.r.l., Agrate Brianza, IT;
Abstract
The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.