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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11600472 B1

PDFFull Text
Date of Patent:
Mar. 07, 2023

Filed:

Feb. 22, 2018

Vacuum processing apparatus and operating method of vacuum processing apparatus

Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Ryoichi Isomura, Tokyo, JP;

Yuusaku Sakka, Tokyo, JP;

Kouhei Satou, Tokyo, JP;

Takashi Uemura, Tokyo, JP;

Satoshi Yamamoto, Tokyo, JP;

Hiromichi Kawasaki, Tokyo, JP;

Assignee:

HITACHI HIGH-TECH CORPORATION, Tokyo, JP;

Attorney:

Miles & Stockbridge, P.C.

Primary Examiner:

Karla A Moore

Assistant Examiner:

Nathan K Ford

Int. Cl.
CPC ...
H01J 37/18 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32862 (2013.01); H01J 37/185 (2013.01); H01J 37/32743 (2013.01); H01J 37/32889 (2013.01); H01J 37/3491 (2013.01); H01L 21/6704 (2013.01); H01L 21/6719 (2013.01); H01L 21/6776 (2013.01); H01L 21/67184 (2013.01); H01L 21/67259 (2013.01); H01L 21/67748 (2013.01); H01L 21/68707 (2013.01);
Abstract

There is provided a vacuum processing apparatus in which at least one of the processing units includes a lower member and an upper member mounted on the lower member to be attachable and detachable that configure the vacuum container, a turning shaft member which is attached to an outer circumferential part of the base plate between the work space and the vacuum container, and has a turning shaft that moves from above the base plate when the turning shaft is connected to the lower member and the lower member turns around the connected part, and a maintenance member including an arm which is disposed above the turning shaft member and turns in a horizontal direction as the upper member is suspended, and in which the lower member is configured to be fixable at the position at a predetermined angle within a range of an angle at which the lower member is capable of turning around the shaft, and to be vertically movable as the arm of the maintenance member fixes the position above a center portion of the lower member of which the position is fixed within a range of the angle at which the lower member is capable of turning, and the upper member is suspended.

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