The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
May. 31, 2019
Applicant:
Luxembourg Institute of Science and Technology (List), Esch-sur-Alzette, LU;
Inventors:
Tom Wirtz, Grevenmacher, LU;
Florian Vollnhals, Erlangen, DE;
Assignee:
LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2018.01); G01N 23/2251 (2018.01); G01N 23/2258 (2018.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01N 23/2258 (2013.01); H01J 49/0004 (2013.01);
Abstract
A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.