The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Feb. 26, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Hanish Kumar Panavalappil Kumarankutty, Bangalore, IN;
Prashant A. Desai, Bangalore, IN;
Diwakar N. Kedlaya, San Jose, CA (US);
Sumit Agarwal, Dublin, CA (US);
Vidyadharan Srinivasa Murthy Bangalore, Bengaluru, IN;
Truong Nguyen, Milpitas, CA (US);
Zubin Huang, Santa Clara, CA (US);
APPLIED MATERIALS, iNC., Santa Clara, CA (US);
Abstract
The present disclosure relates to a lid assembly apparatus and related methods for substrate processing chambers. In one implementation, a lid assembly includes a gas manifold. The gas manifold includes a first gas channel configured to receive a process gas, a second gas channel configured to receive a doping gas, and a third gas channel configured to receive a cleaning gas. The lid assembly also includes a showerhead. The showerhead includes one or more first gas openings that are configured to receive the process gas, and one or more second gas openings that are configured to receive the doping gas.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile