The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Aug. 13, 2020
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Inventors:
Tae Kyung Lee, Suwon-si, KR;
Tae Yoon Kim, Suwon-si, KR;
Sang Kee Yoon, Suwon-si, KR;
Chang Hyun Lim, Suwon-si, KR;
Jong Woon Kim, Suwon-si, KR;
Moon Chul Lee, Suwon-si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/17 (2006.01); H03H 9/13 (2006.01); H01L 41/053 (2006.01); H01L 41/29 (2013.01); H01L 41/31 (2013.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02007 (2013.01); H01L 41/053 (2013.01); H01L 41/29 (2013.01); H01L 41/31 (2013.01); H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 9/02157 (2013.01); H03H 9/13 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H03H 9/174 (2013.01); H03H 9/54 (2013.01); H03H 2003/023 (2013.01);
Abstract
An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 Å≤ΔMg≤170 Å may be satisfied, ΔMg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.