The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2023

Filed:

Nov. 13, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Koji Ohashi, Matsumoto, JP;

Hironori Suzuki, Chino, JP;

Chikara Kojima, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); B06B 1/06 (2006.01); H04R 17/00 (2006.01); G01H 11/08 (2006.01); G01S 15/08 (2006.01); G01S 15/42 (2006.01); G01S 3/808 (2006.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); B06B 1/0644 (2013.01); G01H 11/08 (2013.01); G01S 3/808 (2013.01); G01S 15/08 (2013.01); G01S 15/42 (2013.01); H02N 2/001 (2013.01); H04R 17/00 (2013.01);
Abstract

An ultrasonic device according to an aspect of the present disclosure includes a substrate in which an opening section piercing through the substrate in a thickness direction is provided, a vibration plate provided on the substrate to close the opening section, a piezoelectric element provided in a position corresponding to the opening section on a first surface at the opposite side of the substrate side of the vibration plate, and an elastic layer provided in contact with a second surface at the substrate side of the vibration plate at the inner side of the opening section of the substrate. The elastic layer includes a curved surface recessed to the vibration plate side at the opposite side of the vibration plate side.


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