The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Mar. 19, 2020
Seiko Epson Corporation, Tokyo, JP;
Chikara Kojima, Matsumoto, JP;
Eiji Osawa, Chino, JP;
Koji Ohashi, Matsumoto, JP;
Kanechika Kiyose, Matsumoto, JP;
Tomohiro Sayama, Matsumoto, JP;
Hironori Suzuki, Chino, JP;
Katsuhiro Imai, Minowa-machi, JP;
Yasuyuki Matsumoto, Azumino, JP;
Takahiro Kamijo, Matsumoto, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.