The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Sep. 11, 2018
Applicant:
Tdk Corporation, Tokyo, JP;
Inventor:
Junichi Kimura, Tokyo, JP;
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H01L 41/047 (2006.01); H01L 41/083 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0478 (2013.01); H01L 41/083 (2013.01); H01L 41/187 (2013.01);
Abstract
Provided is a piezoelectric thin film device in which lattice mismatch between a piezoelectric thin film and a lower electrode layer (first electrode layer) is reduced. A piezoelectric thin film devicecomprises a first electrode layerand a piezoelectric thin filmlaminated directly on the first electrode layer; the first electrode layerincludes an alloy composed of two or more metal elements; the first electrode layerhas a body-centered cubic lattice structure; and the piezoelectric thin filmhas a wurtzite structure.