The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Oct. 20, 2020
Samsung Display Co., Ltd., Yongin-si, KR;
Yong-Hwan Ryu, Yongin-si, KR;
Woo Jin Cho, Yongin-si, KR;
Jong-Hyun Choung, Suwon-si, KR;
Jae Uoon Kim, Hwaseong-si, KR;
Sun-Jin Song, Asan-si, KR;
Hyun Duck Cho, Anyang-si, KR;
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Abstract
A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.