The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Sep. 17, 2020
Applicant:
Maury Microwave, Inc., Ontario, CA (US);
Inventors:
David Brearley, Hacienda Heights, CA (US);
Gary R. Simpson, Fontana, CA (US);
Assignee:
Maury Microwave, Inc., Ontario, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01D 5/14 (2006.01); H01P 1/00 (2006.01); H01P 3/02 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2887 (2013.01); G01D 5/14 (2013.01); H01P 1/00 (2013.01); H01P 3/02 (2013.01);
Abstract
The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.