The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
May. 23, 2019
Applicant:
Jx Nippon Mining & Metals Corporation, Tokyo, JP;
Inventors:
Masayoshi Shimizu, Ibaraki, JP;
Manami Masuda, Ibaraki, JP;
Yasuyuki Iwabuchi, Ibaraki, JP;
Takashi Kosho, Ibaraki, JP;
Assignee:
JX Nippon Mining & Metals Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); G11B 5/733 (2006.01); G11B 5/84 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); G11B 5/7334 (2019.05); G11B 5/8404 (2013.01); H01J 37/3426 (2013.01);
Abstract
Provided is a sputtering target containing 0.05 at % or more of Bi, and having a total content of metal oxides of from 10 vol % to 70 vol %, the balance containing at least Ru.