The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2023

Filed:

Oct. 28, 2020
Applicant:

Universal Display Corporation, Ewing, NJ (US);

Inventors:

Gregory McGraw, Yardley, PA (US);

William E. Quinn, Whitehouse Station, NJ (US);

Matthew King, Moorestown, NJ (US);

Elliot H. Hartford, Jr., Morristown, NJ (US);

Siddharth Harikrishna Mohan, Plainsboro, NJ (US);

Benjamin Swedlove, Churchville, PA (US);

Gregg Kottas, Ewing, NJ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/12 (2006.01); C23C 14/22 (2006.01); B41J 2/045 (2006.01); C23C 14/04 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); B41J 2/045 (2013.01); C23C 14/04 (2013.01); C23C 14/228 (2013.01); C23C 14/54 (2013.01); B05D 1/60 (2013.01); B41J 2202/02 (2013.01); H01L 51/0005 (2013.01); H01L 51/56 (2013.01);
Abstract

Methods of modulating flow during vapor jet deposition of organic materials are provided. A method may include ejecting a vapor entrained in a delivery gas from a nozzle onto a substrate upon which the vapor condenses. A confinement gas may be provided that has a flow direction opposing a flow direction of the delivery gas ejected from the nozzle. A vacuum source may be provided that is adjacent to a delivery gas aperture of the nozzle. The method may include adjusting, by an actuator, a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target.


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