The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2023

Filed:

Feb. 26, 2020
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Koji Yamamoto, Nagaokakyo, JP;

Masatoshi Nakagawa, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03F 3/24 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H04B 1/40 (2015.01);
U.S. Cl.
CPC ...
H03H 9/02897 (2013.01); H03F 3/24 (2013.01); H03H 9/02834 (2013.01); H03H 9/02866 (2013.01); H03H 9/059 (2013.01); H03H 9/1092 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H04B 1/40 (2013.01); H03F 2200/171 (2013.01); H03F 2200/451 (2013.01);
Abstract

An acoustic wave device includes a laminated film on a support substrate and inside a portion of an outer edge of the support substrate in plan view and including a piezoelectric thin film, an IDT electrode on the laminated film, an insulating layer on the support substrate and the laminated film and extending from a region above the support substrate to a region above the laminated film, a connecting electrode on the insulating layer and electrically connected to the IDT electrode, and an external connection terminal electrically connected to the connecting electrode and disposed directly on or above the connecting electrode and outside a region where the laminated film is on the support substrate. A principal surface of the support substrate on the laminated film side includes a recess at an outer edge of the laminated film, and the recess is covered with the insulating layer.


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