The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Aug. 28, 2019
Vat Holding Ag, Haag, CH;
Michael Dür, Hohenweiler, AT;
Rico Rohner, Widnau, CH;
Adrian Eschenmoser, Grabs, CH;
Marco Apolloni, Marbach, CH;
VAT HOLDING AG, Haag, CH;
Abstract
A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.