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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11587771 B1

PDFFull Text
Date of Patent:
Feb. 21, 2023

Filed:

May. 17, 2018

Chemistry compatible coating material for advanced device on-wafer particle performance

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jennifer Y. Sun, Mountain View, CA (US);

Biraja P. Kanungo, San Jose, CA (US);

Dmitry Lubomirsky, Cupertino, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Michael E La Villa

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); C23C 4/134 (2016.01); C23C 4/11 (2016.01); C04B 41/50 (2006.01); C04B 41/00 (2006.01); C04B 41/87 (2006.01); C04B 35/10 (2006.01); C23C 4/10 (2016.01); C04B 35/00 (2006.01); H01L 21/3065 (2006.01); H01L 21/56 (2006.01); H01L 21/48 (2006.01); C04B 35/505 (2006.01); C04B 35/48 (2006.01); B32B 15/20 (2006.01); B32B 15/04 (2006.01); C04B 35/01 (2006.01); C04B 35/50 (2006.01); C23C 26/00 (2006.01); C23C 30/00 (2006.01); C23C 4/12 (2016.01); B32B 18/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); B32B 15/04 (2013.01); B32B 15/20 (2013.01); B32B 18/00 (2013.01); C04B 35/00 (2013.01); C04B 35/01 (2013.01); C04B 35/48 (2013.01); C04B 35/50 (2013.01); C04B 35/505 (2013.01); C04B 41/009 (2013.01); C04B 41/5042 (2013.01); C04B 41/5045 (2013.01); C04B 41/87 (2013.01); C23C 4/10 (2013.01); C23C 4/11 (2016.01); C23C 4/12 (2013.01); C23C 4/134 (2016.01); C23C 26/00 (2013.01); C23C 30/00 (2013.01); H01J 37/32477 (2013.01); H01L 21/02 (2013.01); H01L 21/02104 (2013.01); H01L 21/02252 (2013.01); H01L 21/3065 (2013.01); H01L 21/4807 (2013.01); H01L 21/56 (2013.01); H01L 21/67017 (2013.01); H01L 21/67069 (2013.01); Y10T 428/1259 (2015.01); Y10T 428/12597 (2015.01); Y10T 428/12604 (2015.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12625 (2015.01); Y10T 428/12736 (2015.01); Y10T 428/12993 (2015.01); Y10T 428/2495 (2015.01); Y10T 428/24355 (2015.01); Y10T 428/24413 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24975 (2015.01); Y10T 428/252 (2015.01); Y10T 428/256 (2015.01); Y10T 428/263 (2015.01);
Abstract

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

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