The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Dec. 26, 2017
Mitsubishi Electric Corporation, Tokyo, JP;
MITSUBISHI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
A reaction compensation device includes a drive mechanism driving a first movable part with respect to a base, a reaction mass drive mechanism driving a second movable part with respect to the base; and a first relative position sensor measuring a relative position between the first movable part and the base. There is also a second relative position sensor measuring a relative position between the second movable part and the base, a first control system controlling the drive mechanism by taking in a signal outputted from the first relative position sensor as a feedback signal in response to a command value, and a second control system correcting the command value using a correction parameter for adjusting a difference between mass properties of the drive mechanism and reaction mass drive mechanism and for controlling the reaction mass drive mechanism.