The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Jul. 16, 2021
Taiwan Redeye Biomedical Inc., Hsinchu, TW;
Shuo-Ting Yan, Hsinchu, TW;
TAIWAN REDEYE BIOMEDICAL INC., Hsinchu, TW;
Abstract
A particle detection device includes a detection tube, a light emitter, a light receiver, and a processing unit. The detection tube is for a detection solution to pass through. The light emitter generates a detection light and emits the detection light to the detection solution. The light receiver receives the detection light scattered from the detection solution. The processing unit generates a received light intensity value according to the detection signal generated by the light receiver, and determines whether the received light intensity value is greater than a first threshold value: if greater, generating a detection result of particles; otherwise, generating a detection result of no particles. Then it provides a basis for semiconductor manufacturing companies to evaluate whether the detection solution can be used in a high-precision manufacturing processes, thereby optimizing the manufacturing process and improving the yield rate of the high-precision manufacturing process.