The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Jan. 10, 2019
Applicant:
Sciosense B.v., AE Eindhoven, NL;
Inventors:
Willem Frederik Adrianus Besling, JN Eindhoven, NL;
Remco Henricus Wilhelmus Pijnenburg, AE Hoogeloon, NL;
Kailash Vijayakumar, KN Eindhoven, NL;
Jörg Siegert, Graz, AT;
Alessandro Faes, Premstätten, AT;
Assignee:
SCIOSENSE B.V., Ae Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01); G01L 9/0042 (2013.01);
Abstract
A capacitive sensor is disclosed. In an embodiment a semiconductor device includes a die including a capacitive pressure sensor integrated on a CMOS circuit, wherein the capacitive pressure sensor includes a first electrode and a second electrode separated from one another by a cavity, the second electrode including a suspended tensile membrane, and wherein the first electrode is composed of one or more aluminum-free layers containing Ti.