The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Dec. 31, 2021
Aac Kaitai Technologies (Wuhan) Co., Ltd, Hubei, CN;
Zhao Ma, Shenzhen, CN;
Zhan Zhan, Shenzhen, CN;
Shan Yang, Shenzhen, CN;
Xiao Kan, Shenzhen, CN;
Yang Li, Shenzhen, CN;
Veronica Tan, Singapore, SG;
Yan Hong, Shenzhen, CN;
Kahkeen Lai, Singapore, SG;
AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD, Wuhan, CN;
Abstract
The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M−1 first beam units by the nodes. The straight beam is divided into N−1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.