The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2023

Filed:

Oct. 22, 2020
Applicant:

National Tsing Hua University, Hsinchu, TW;

Inventors:

Shih-Jung Ho, Tainan, TW;

Hsueh-Shih Chen, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 4/00 (2006.01); B01J 19/00 (2006.01); B01J 19/18 (2006.01); B01J 19/26 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); B01J 19/26 (2013.01); H01L 21/67155 (2013.01); B01J 4/002 (2013.01); B01J 19/0013 (2013.01); B01J 2219/0002 (2013.01); B01J 2219/0006 (2013.01); B01J 2219/0009 (2013.01); B01J 2219/00063 (2013.01); B01J 2219/00087 (2013.01); B01J 2219/00164 (2013.01);
Abstract

A clustered reaction system includes multiple reaction devices, a cooling device and a gas supply device. Each of the reaction devices includes a reaction tank unit defining a reaction space, multiple through holes extending through the reaction tank unit, a heat exchange module including a heat exchange passage surrounding the reaction tank, and an injection module extending through one of the through hole. The cooling device is connected to the heat exchange passages of the reaction devices for supplying a coolant into the heat exchange passages. The gas supply device is communicated fluidly with one of the through holes of each of the reaction devices for supplying a gas to the reaction devices.


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