The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Jan. 12, 2021
Applied Materials, Inc., Santa Clara, CA (US);
National University of Singapore, Singapore, SG;
Andrea Leoncini, Singapore, SG;
Paul Mehlmann, Singapore, SG;
Nemanja Dordevic, Singapore, SG;
Han Vinh Huynh, Singapore, SG;
Doreen Wei Ying Yong, Singapore, SG;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Molybdenum(0) coordination complexes comprising an arene ligand and one or more neutral ligands which coordinate to the metal center by carbon, nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.