The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2023

Filed:

Jun. 19, 2020
Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Takeshi Tanaka, Hitachi, JP;

Ryota Isono, Hitachi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); C04B 35/565 (2006.01); C04B 35/581 (2006.01); C04B 41/87 (2006.01); C04B 41/88 (2006.01); C04B 41/50 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
C04B 35/565 (2013.01); C04B 35/581 (2013.01); C04B 41/5025 (2013.01); C04B 41/87 (2013.01); C04B 41/88 (2013.01); H01L 29/7786 (2013.01); B82Y 30/00 (2013.01); C04B 2237/08 (2013.01); C04B 2237/363 (2013.01); C04B 2237/366 (2013.01); C04B 2237/406 (2013.01); C04B 2237/704 (2013.01); C04B 2237/72 (2013.01);
Abstract

There is provided a group III nitride laminate, including: a substrate comprised of silicon carbide; a first layer comprised of aluminum nitride and formed on the substrate; a second layer comprised of gallium nitride and formed on the first layer; and a third layer formed on the second layer and comprised of group III nitride having an electron affinity lower than that of the gallium nitride which is comprised in the second layer, the second layer having a thickness of less than 500 nm, the second layer containing iron at a concentration of less than 1×10/cm, and the second layer containing carbon at a concentration of less than 1×10/cm.


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