The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Mar. 06, 2020
Applicant:
Kioxia Corporation, Minato-ku, JP;
Inventor:
Takeshi Ito, Yokkaichi, JP;
Assignee:
Kioxia Corporation, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 21/48 (2006.01); H01L 21/66 (2006.01); H01L 27/11565 (2017.01); H01L 27/1157 (2017.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); H01L 21/48 (2013.01); H01L 22/12 (2013.01); H01L 27/1157 (2013.01); H01L 27/11565 (2013.01);
Abstract
A semiconductor device of an embodiment includes a plurality of chip regions, each including a memory region in which a plurality of memory cells is arranged, and a kerf region disposed between the chip regions and surrounding each chip region. Paired marks are arranged in a vicinity of the memory region of one of the plurality of chip regions and in a common hierarchical layer in the kerf region, and the paired marks are disposed over upper and lower hierarchical layers.